Characterization of Mo/Si multilayer growth on stepped topographies
نویسندگان
چکیده
منابع مشابه
Cell adhesion on polyelectrolyte multilayer coated polydimethylsiloxane surfaces with varying topographies.
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2011
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.3628640